#7878. Tip- and Laser-based 3D Nanofabrication in Extended Macroscopic Working Areas

October 2026publication date
Proposal available till 15-05-2025
4 total number of authors per manuscript0 $

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Journal’s subject area:
Materials Science (miscellaneous);
Mechanical Engineering;
Industrial and Manufacturing Engineering;
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Abstract:
The field of optical lithography is subject to intense research and has gained enormous improvement. However, the effort necessary for creating structures at the size of 20 nm and below is considerable using conventional technologies. This effort and the resulting financial requirements can only be tackled by few global companies and thus a paradigm change for the semiconductor industry is conceivable: custom design and solutions for specific applications will dominate future development.
Keywords:
Laser-based; Nanofabrication; Nanomanufacturing; Nanomeasuring; Nanopositioning; Scale-spanning; Tip-based

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