#7877. Development and Implementation of a Rotating Nanoimprint Lithography Tool for Orthogonal Imprinting on Edges of Curved Surfaces

October 2026publication date
Proposal available till 15-05-2025
4 total number of authors per manuscript0 $

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Journal’s subject area:
Materials Science (miscellaneous);
Mechanical Engineering;
Industrial and Manufacturing Engineering;
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Abstract:
Uniform molding and demolding of structures on highly curved surfaces through conformal contact is a crucial yet often-overlooked aspect of nanoimprint lithography (NIL). This study describes the development of a NIL tool and its integration into a nanopositioning and nanomeasuring machine to achieve high-precision orthogonal molding and demolding for soft ultraviolet-assisted NIL.
Keywords:
Curved surface; Imprinting; Nanoimprint lithography; Nanopositioning; Rotating NIL tool

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