#7261. Physical, tribological and mechanical properties of polymer composite coating on silicon wafer

October 2026publication date
Proposal available till 11-05-2025
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Journal’s subject area:
Mechanical Engineering;
Mechanics of Materials;
Surfaces, Coatings and Films;
Surfaces and Interfaces;
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Abstract:
Silicon is an ideal material used by semiconductor industry for fabrication of micro electro mechanical systems=. But its brittleness property and hydrophilic nature has shown higher adhesion, causes higher friction and wear. Therefore, researchers have tried to develop alternate self-lubricating material and found a suitable epoxy polymer resin (SU-8). Hence in the current study, SU-8 is reinforced with three different fillers individually to form composite coatings and in combination to form hybrid composite coatings. Of all the coatings, the hybrid composite coating of SU-8/talc/PFPE showed the best tribo-mechanical properties as compared to pristine SU-8. The wettability test results showed that the surface of the SU-8 coating changed from hydrophilic to hydrophobic in nature after blending it with PFPE.
Keywords:
Coating; Graphite, Talc; PFPE; Silicon; SU-8

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