#5703. Design and modeling of decoupled miniature fast steering mirror with ultrahigh precision

July 2026publication date
Proposal available till 23-05-2025
4 total number of authors per manuscript0 $

The title of the journal is available only for the authors who have already paid for
Journal’s subject area:
Civil and Structural Engineering;
Aerospace Engineering;
Control and Systems Engineering;
Mechanical Engineering;
Computer Science Applications;
Signal Processing;
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Abstract:
To address the problem of low tracking precision caused by mechanical cross-coupling between the axes of a two-degree-of-freedom fast steering mirror (FSM), this study introduces an ultrahigh precision decoupled miniature fast steering mirror (MFSM) realized in a tiny volume. The proposed MFSM is driven by piezoelectric actuators and guided by a ring-type flexible hinge to achieve high-precision deflection and kinematic decoupling. A theoretical analysis of rotational stiffness was conducted to perform a detailed decoupling design. The output angle of the mirror was then evaluated. The relationship between the input voltage and the output angle was determined by modeling the dynamic characteristics of the MFSM. Owing to the mechanical decoupling property of the MFSM, two independent proportional–integral–derivative (PID) controllers were used separately for axis control, and experiments on trajectory tracking control were performed.
Keywords:
Decoupling design; Miniature fast steering mirror; Tracking control; Ultrahigh precision

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